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TES\u5355\u8154\u5f0fECR\u7b49\u79bb\u5b50\u4f53\u6e90<\/a><\/strong>
\nPolygon Physics\u516c\u53f8\u7684TES\u662f\u7d27\u51d1\u578bECR\u79bb\u5b50\u6e90<\/a>\u7cfb\u5217\uff0c\u4e13\u4e3a\u8d85\u9ad8\u771f\u7a7a\uff08UHV\uff09\u6216\u9ad8\u771f\u7a7a\uff08HV\uff09\u73af\u5883\u4e0b\u7684\u8868\u9762\u79d1\u5b66\u4e0e\u5904\u7406\u8bbe\u8ba1\uff0c\u53ef\u4ea7\u751f\u79bb\u5b50\u3001\u7b49\u79bb\u5b50\u4f53\u3001\u7535\u5b50\u6216\u539f\u5b50\u675f\u6d41\u3002\u51ed\u501f\u53ef\u9009\u7684\u591a\u79cd\u5f15\u51fa\u7cfb\u7edf\u53ca\u53ef\u5b9a\u5236\u5316\u675f\u6d41\u5149\u5b66\u914d\u7f6e\uff0cTES\u662f\u771f\u6b63\u7684\u591a\u529f\u80fd\u79bb\u5b50\u6e90\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n

\u5e94\u7528\uff1a<\/strong><\/p>\n

\u523b\u8680
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\n\u7535\u5b50\u5316\u5b66<\/p>\n

\u4f18\u52bf<\/strong>
\n\u9ad8\u4eae\u5ea6\u7cfb\u7edf
\n\u9ad8\u529f\u7387\u7535\u5b50\u675f
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\"\"<\/p>\n\n\n\n\n\n\n\n\n\n
TES-63<\/th>\nelectrons<\/th>\nions<\/th>\nions-high brightness<\/th>\nions-scanner<\/th>\n<\/tr>\n<\/thead>\n
Applications<\/td>\nElectron chemistry (down to 100 V) \/ High power e-beam up to 1.5 kW<\/td>\nBeam line, accelerator, mass spectroscopy, sputtering<\/td>\nBeam line, accelerator, mass spectroscopy, etching<\/td>\nEtching, Figuring<\/td>\n<\/tr>\n
Energy range<\/td>\n100 V \u2013 15 kV<\/td>\n0.5 \u2013 15 kV<\/td>\n0.5\u2013 15 kV<\/td>\n0.5 \u2013 15 kV<\/td>\n<\/tr>\n
Current<\/td>\n<\/td>\n0.1 to 5 \u00b5A – typ. with 0.3 mm extractor
\n10 to 500 \u00b5A – typ. with 3 mm extractor<\/td>\n		0.3 to 300 \u00b5A<\/td>\n10 to 500 \u00b5A<\/td>\n<\/tr>\n
Beam size (typ. @ 10 cm from Einzel)<\/td>\nEnergy and focus dependent<\/td>\n0.3 -30 mm<\/td>\n0.5-5 mm<\/td>\n0.3 to 5mm<\/td>\n<\/tr>\n
Insertion depth<\/td>\nfrom 150 mm or longer on demand<\/td>\nfrom 150 mm or longer on demand<\/td>\n300 mm with Einzel<\/td>\n360 mm with Einzel and scanner<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

Polygon physics TES63 ECR\u79bb\u5b50\u6e90<\/a>\u3001TES\u5355\u8154\u5f0fECR\u7b49\u79bb\u5b50\u4f53\u6e90\u3001ECR\u79bb\u5b50\u6e90\u3001Polygon physics\u79bb\u5b50\u6e90<\/a>\u3001Polygon physics TES63\u79bb\u5b50\u6e90<\/a><\/p>\n

ECR\u79bb\u5b50\u6e90<\/a>\nPolygon physics TES63 ECR\u79bb\u5b50\u6e90<\/a>\nPolygon physics TES63\u79bb\u5b50\u6e90<\/a>\nPolygon physics\u79bb\u5b50\u6e90<\/a>\nTES\u5355\u8154\u5f0fECR\u7b49\u79bb\u5b50\u4f53\u6e90<\/a><\/div>","protected":false},"excerpt":{"rendered":"

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