{"id":222,"date":"2025-07-14T15:17:13","date_gmt":"2025-07-14T07:17:13","guid":{"rendered":"https:\/\/www.bihec.com\/polygonphysic\/?p=222"},"modified":"2025-07-14T15:17:13","modified_gmt":"2025-07-14T07:17:13","slug":"polygon-physics-tes-go-ecr%e7%a6%bb%e5%ad%90%e6%ba%90%e3%80%81tes%e5%8d%95%e8%85%94%e5%bc%8fecr%e7%ad%89%e7%a6%bb%e5%ad%90%e4%bd%93%e6%ba%90%e3%80%81ecr%e7%a6%bb%e5%ad%90%e6%ba%90%e3%80%81polygon-phys","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/polygonphysic\/polygon-physics-tes-go-ecr%e7%a6%bb%e5%ad%90%e6%ba%90%e3%80%81tes%e5%8d%95%e8%85%94%e5%bc%8fecr%e7%ad%89%e7%a6%bb%e5%ad%90%e4%bd%93%e6%ba%90%e3%80%81ecr%e7%a6%bb%e5%ad%90%e6%ba%90%e3%80%81polygon-phys\/","title":{"rendered":"Polygon physics TES-GO ECR\u79bb\u5b50\u6e90\u3001TES\u5355\u8154\u5f0fECR\u7b49\u79bb\u5b50\u4f53\u6e90\u3001ECR\u79bb\u5b50\u6e90\u3001Polygon physics\u79bb\u5b50\u6e90"},"content":{"rendered":"

TES\u5355\u8154\u5f0fECR\u7b49\u79bb\u5b50\u4f53\u6e90<\/a><\/strong>
\nPolygon Physics\u516c\u53f8\u7684TES\u662f\u7d27\u51d1\u578bECR\u79bb\u5b50\u6e90<\/a>\u7cfb\u5217\uff0c\u4e13\u4e3a\u8d85\u9ad8\u771f\u7a7a\uff08UHV\uff09\u6216\u9ad8\u771f\u7a7a\uff08HV\uff09\u73af\u5883\u4e0b\u7684\u8868\u9762\u79d1\u5b66\u4e0e\u5904\u7406\u8bbe\u8ba1\uff0c\u53ef\u4ea7\u751f\u79bb\u5b50\u3001\u7b49\u79bb\u5b50\u4f53\u3001\u7535\u5b50\u6216\u539f\u5b50\u675f\u6d41\u3002\u51ed\u501f\u53ef\u9009\u7684\u591a\u79cd\u5f15\u51fa\u7cfb\u7edf\u53ca\u53ef\u5b9a\u5236\u5316\u675f\u6d41\u5149\u5b66\u914d\u7f6e\uff0cTES\u662f\u771f\u6b63\u7684\u591a\u529f\u80fd\u79bb\u5b50\u6e90\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n

\u5e94\u7528<\/strong><\/p>\n

\u8680\u523b
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\n\u675f\u7ebf<\/p>\n

\u4f18\u52bf<\/strong><\/p>\n

\u771f\u7a7a\u73af\u5883\u79fb\u52a8
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\n\u7d27\u51d1\u8bbe\u8ba1
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\"\"<\/p>\n\n\n\n\n\n\n\n\n\n
TES-GO<\/th>\nions-high brightness<\/th>\nions-broad beam<\/th>\nelectrons-neutralizer<\/th>\n<\/tr>\n<\/thead>\n
Applications<\/td>\nEtching, figuring, sputtering, surface activation, beam line<\/td>\nEtching, sputtering, surface activation<\/td>\nElectron chemistry, neutralization, surface modification<\/td>\n<\/tr>\n
Energy range<\/td>\n0.5 \u2013 5 kV<\/td>\n0.1 \u2013 5 kV<\/td>\n0.1 \u2013 5 kV<\/td>\n<\/tr>\n
Current<\/td>\n10 to 500 \u00b5A<\/td>\n0.3 to 3 mA<\/td>\n0.1 to 50 mA<\/td>\n<\/tr>\n
Beam size (typ. @ 4 cm)<\/td>\n0.3 to 15mm<\/td>\nEnergy dependent<\/td>\n3-30 mm<\/td>\n<\/tr>\n
Source length (exc. connectors)<\/td>\n192 mm with Einzel<\/td>\n150 mm<\/td>\n150 mm \/ 192 mm with Einzel<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

Polygon physics TES-GO ECR\u79bb\u5b50\u6e90<\/a>\u3001TES\u5355\u8154\u5f0fECR\u7b49\u79bb\u5b50\u4f53\u6e90\u3001ECR\u79bb\u5b50\u6e90\u3001Polygon physics\u79bb\u5b50\u6e90<\/a><\/p>\n

ECR\u79bb\u5b50\u6e90<\/a>\nPolygon physics TES-GO ECR\u79bb\u5b50\u6e90<\/a>\nPolygon physics\u79bb\u5b50\u6e90<\/a>\nTES\u5355\u8154\u5f0fECR\u7b49\u79bb\u5b50\u4f53\u6e90<\/a><\/div>","protected":false},"excerpt":{"rendered":"

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